Low Cost Mass Manufacturable Silicon Nano-Sensors for Detection of Molecules in Gas Phase
Abstract
We report uniform and reproducible thin film polycrystalline silicon (polysilicon) nanowire sensor platform realized by an advanced spacer etch process in a mature 3 micron lithography.
Article Information
| Journal | SF Journal of Nanochemistry and Nanotechnology |
| Article Type | Research Article |
| Volume | 1 |
| Issue | 1 |